Pattern exposure apparatus, device manufacturing method, and exposure apparatus

A device manufacturing method of forming a pattern for an electronic device onto a substrate by obliquely illuminating illumination light from an illumination unit to a spatial light modulating element including a plurality of micro mirrors selectively driven based on drawing data of the pattern for the electronic device and by projecting and exposing reflected light from selected micro mirrors of the spatial light modulating element in an ON state to the substrate via a projection unit,

• wherein the method comprises:
• a step of condensing light from a surface light source including a predetermined shape generated in the illumination unit as the illumination light and obliquely irradiating the light to the spatial light modulating element at a predetermined incidence angle;
• and
• a step of deforming an outline shape of the surface light source so as to correct distortion of an outline of an image of the surface light source, which is formed on a pupil of the projection unit by the reflected light from the micro mirrors of the spatial light modulating element in the ON state, into an elliptical shape according to the incidence angle.

An exposure apparatus comprising:

• a spatial light modulating element including a plurality of micro mirrors;
• an illumination unit configured to irradiate the spatial light modulating element with illumination light;
• and
• a projection unit configured to project light reflected from ON-state micro mirrors among the plurality of micro mirrors,
• wherein the illumination unit comprises:
• a first cylindrical lens having a positive refractive power in a first plane that includes an optical axis of the illumination unit;
• a second cylindrical lens having a negative refractive power in the first plane;
• and
• a condensing optical member configured to condense light passed through the first cylindrical lens and the second cylindrical lens so as to irradiate the spatial light modulating element with the condensed light.