Method and swapping tool

A swapping tool configured to swap an optical system of a projection exposure apparatus, the swapping tool comprising:

• an xyz carrier configured to raise and lower the optical system along a centre axis of the optical system;
• an rz carrier configured to rotate the optical system about the centre axis;
• and
• an x frame configured to shift the optical system perpendicularly to the centre axis, wherein:
• the xyz carrier is configured so that, when the xyz carrier raises the optical system along the centre axis, mount struts of the optical system lose contact with frame struts of a frame carrying the optical system;
• the rz carrier is configured so that, when the mounts struts are not in contact with the frame struts and the rz carrier rotates the optical system about the centre axis, the mount struts are between the frame struts;
• the xyz carrier is configured to lower the optical system along the centre axis when the mount struts are between the frame struts;
• and
• the x frame is configured so that, when the mount struts are between the frame struts, the x frame shifts the optical system perpendicularly to the optical axis to move the optical system out of a housing of the projection exposure apparatus.

An apparatus, comprising:

• an optical system comprising mount struts;
• a frame comprising frame struts in contact with the mount struts so that the frame carries the optical system;
• and
• a swapping tool, comprising:
• an xyz carrier configured to raise and lower the optical system along a centre axis of the optical system;
• an rz carrier configured to rotate the optical system about the centre axis;
• and
• an x frame configured to shift the optical system perpendicularly to the centre axis, wherein:
• the xyz carrier is configured so that, when the xyz carrier raises the optical system along the centre axis, the mount struts lose contact with the frame struts;
• the rz carrier is configured so that, when the mounts struts are not in contact with the frame struts and the rz carrier rotates the optical system about the centre axis, the mount struts are between the frame struts;
• the xyz carrier is configured to lower the optical system along the centre axis when the mount struts are between the frame struts;
• the x frame is configured so that, when the mount struts are between the frame struts, the x frame shifts the optical system perpendicularly to the optical axis to move the optical system out of a housing of the apparatus;
• and
• the apparatus is a projection exposure apparatus.