Method for manufacturing cured film and use of the same

A method for producing a cured film, comprising the steps of:

• (1) applying a (i) composition above a substrate;
• (2) (i) forming a hydrocarbon-containing film from the composition;
• and
• (3) irradiating the hydrocarbon-containing film with an electron beam or ions to form a cured film
• provided that (i) the composition comprises (A) a hydrocarbon-containing compound, and (B) a solvent;
• the (A) hydrocarbon-containing compound comprises a structural unit (A1) represented by the following formula (A1):
• wherein Ar11 is a C6-60 hydrocarbon substituted or unsubstituted with R11 (provided that Ar11 does not contain a fused aromatic ring);
• R11 is a C1-20 linear, branched or cyclic alkyl, amino or alkylamino;
• R12 is I, Br or CN;
• p11 is a number of 0 to 5, p12 is a number of 0 to 1, q11 is a number of 0 to 5, q12 is a number of 0 to 1, r11 is a number of 0 to 5, and s11 is a number from 0 to 5;
• p11, q11 and r11 are not simultaneously 0 in one constitutional unit;
• in the case electron beam irradiation is performed in step (3),
• acceleration voltage is 2 kV to 200 kV, or the irradiation dose is 100 kGy to 5,000 kGy,
• in the case ions are irradiated in the step (3),
• the elemental species of the ions to be irradiated is hydrogen, boron, carbon, nitrogen, a rare gas, or a mixture of any of these,
• the acceleration voltage is 3 to 1000 kV, or
• the irradiation dose is 1013 to 1018 ions/cm 2, wherein the cured film formed in the step (3) has an intensity ratio R=ID/IG of 0.35 to 0.90 in Raman spectroscopic analysis (measured with a laser wavelength of 514.5 nm).