Parallel microcavity trimming by structured-laser illumination
AssigneeMassachusetts Institute of Technology
InventorsChristopher Louis Panuski, Ian Robert Christen, Dirk Robert Englund
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Abstract
Methods and systems are described for precisely adjusting characteristics of microfabricated devices after device fabrication. The adjustments can be carried out in parallel on a plurality of the microfabricated devices. By carrying out the adjustment process, uniformity of feature sizes to a few picometers (one standard deviation) and corresponding uniformity of operating characteristics for a plurality of microfabricated devices are possible.
Claims12
A method for adjusting characteristics of a plurality of microfabricated devices in parallel, the method comprising:
- measuring an initial characteristic of each microfabricated device of the plurality of microfabricated devices;
- determining, based on the initial characteristics for each microfabricated device, a target characteristic;
- selecting two or more microfabricated devices from among the plurality of microfabricated devices whose characteristics should be adjusted toward the target characteristic;
- directing a plurality of optical beams onto the two or more microfabricated devices to thereby adjust in parallel the characteristics of the two or more microfabricated devices toward the target characteristic;
- measuring in parallel an adjusted characteristic of each microfabricated device of the two or more microfabricated devices;
- and
- determining whether the adjusted characteristics measured for the two or more microfabricated devices are within an acceptable range of values.
Dependencies are inferred from the claim text.