MEMS mirror for coupling and compensating laser device to photonic integrated circuit
AssigneeCisco Technology, Inc.
InventorsJaleel Moidu, John Heanue
Life of this patent
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Abstract
Disclosed is an opto-electronic module including a first substrate, a photonic integrated circuit (PIC) attached to the first substrate, a laser assembly attached to the first substrate, and a microelectromechanical systems (MEMS) micro-mirror device positioned between the laser and the waveguide. The PIC comprising a waveguide. The laser assembly is configured to generate a laser beam to optically couple to the waveguide. The laser assembly includes a thermal electric cooler (TEC) and a laser thermally coupled to the TEC. The MEMS micro-mirror device comprising an actuatable MEMS mirror and a fixed mirror.
Claims20
An opto-electronic module, comprising:
- a first substrate;
- a photonic integrated circuit (PIC) attached to the first substrate, the PIC comprising a waveguide;
- a laser assembly attached to the first substrate, the laser assembly configured to generate a laser beam to optically couple to the waveguide, the laser assembly comprising:
- a thermal electric cooler (TEC);
- and
- a laser thermally coupled to the TEC;
- and
- a microelectromechanical systems (MEMS) micro-mirror device positioned between the laser and the waveguide, the MEMS micro-mirror device comprising an actuatable MEMS mirror and a fixed mirror.
An opto-electronic module, comprising:
- a first substrate;
- a photonic integrated circuit (PIC) attached to the first substrate, the PIC comprising a waveguide;
- a plurality of laser assemblies attached to the first substrate, wherein each of the plurality of laser assemblies is configured to generate a laser beam to optically couple to the waveguide, each of the plurality of laser assemblies comprising:
- a thermal electric cooler (TEC);
- and
- a laser thermally coupled to the TEC;
- and
- a plurality of microelectromechanical systems (MEMS) micro-mirror devices, wherein each of the plurality of MEMS micro-mirror devices is positioned between the laser and the waveguide, each of the plurality of MEMS micro-mirror devices comprising an actuatable MEMS mirror and a fixed mirror.
An opto-electronic module, comprising:
- a first substrate;
- a photonic integrated circuit (PIC) attached to the first substrate, the PIC comprising a waveguide;
- a plurality of laser assemblies attached to the first substrate, wherein each of the plurality of laser assemblies is configured to generate a laser beam to optically couple to the waveguide, each of the plurality of laser assemblies comprising:
- a thermal electric cooler (TEC);
- and
- a laser thermally coupled to the TEC;
- a plurality of microelectromechanical systems (MEMS) micro-mirror devices, wherein each of the plurality of MEMS micro-mirror devices is positioned between the laser and the waveguide, each of the plurality of MEMS micro-mirror devices comprising an actuatable MEMS mirror and a fixed mirror;
- a plurality of photodetectors coupled to the waveguide;
- a controller coupled to the plurality of photodetectors;
- and
- a plurality of mirror drivers coupled to the controller, wherein at least one of the plurality of mirror drivers is coupled to at least one of the actuatable MEMS mirrors.
Dependencies are inferred from the claim text.