Integrated optical devices and methods of forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFeng-Wei Kuo, Wen-Shiang Liao
Life of this patent
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Abstract
An integrated optical device includes a substrate, a waveguide structure and a grating structure. The substrate has a waveguide region and a grating region adjacent to each other. The waveguide structure is disposed on the substrate in the waveguide region. The grating structure is disposed on the substrate in the grating region. In some embodiments, the grating structure includes grating bars and grating intervals arranged alternately, and widths of the grating bars of the grating structure are varied.
Claims20
An integrated optical device, comprising:
- a first insulating layer disposed on a substrate;
- a plurality of grating bars disposed within the first insulating layer, wherein each of the grating bars comprises a first filling layer and a second filling layer over the first filling layer, wherein the first filling layer has a tapered sidewall thickness and a substantially uniform bottom thickness;
- and
- a second insulating layer disposed on the first insulating layer and covering the grating bars.
An integrated optical device, comprising:
- a substrate having a first region and a second region adjacent to each other;
- a first reflection layer disposed on the substrate;
- a first insulating layer disposed on the first reflection layer;
- a taper structure embedded within the first insulating layer in the first region;
- a plurality of grating bars embedded within the first insulating layer in the second region, wherein each of the grating bars comprises a first filling layer and a second filling layer over the first filling layer, and the first filling layer is thinner around a top corner while thicker around a bottom corner of the corresponding grating bar;
- and
- a second insulating layer disposed on the first insulating layer covering the taper structure and the grating bars.
An integrated optical device, comprising:
- a substrate having a first region and a second region adjacent to each other;
- a first insulating layer disposed on the substrate;
- a taper structure embedded in the first insulating layer in the first region;
- and
- a plurality of grating bars embedded in the first insulating layer in the second region,
- wherein a bottom surface of the taper structure is substantially flush with bottom surfaces of the grating bars.
Dependencies are inferred from the claim text.