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US 12,585,064 B2Granted
Photonics chips with an integrated semiconductor laser
AssigneeGlobalFoundries U.S. Inc.
InventorsKenneth J. Giewont, Theodore Letavic, Yusheng Bian
Life of this patent
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Abstract
Structures for a photonics chip that include an integrated semiconductor laser and methods of forming such structures. The structure comprises a waveguide core, a multi-layer quantum-well stack, and an optical coupler on a portion of the waveguide core. The optical coupler, which comprises a semiconductor material, is disposed between the portion of the waveguide core and the multi-layer quantum-well stack.
Claims20
A photonics structure comprising:
- a semiconductor substrate;
- a back-end-of-line stack over the semiconductor substrate, the back-end-of-line stack including an opening;
- a first waveguide core;
- a multi-layer quantum-well stack disposed inside the opening in the back-end-of-line stack;
- and
- a first optical coupler on a portion of the first waveguide core, the first optical coupler comprising a semiconductor material, and the first optical coupler disposed between the portion of the first waveguide core and the multi-layer quantum-well stack.
3 more elements
A method of forming a photonics structure, the method comprising:
- forming a back-end-of-line stack over a semiconductor substrate, wherein the back-end-of-line stack includes an opening;
- forming a waveguide core;
- forming a multi-layer quantum-well stack disposed inside the opening in the back-end-of-line stack;
- and
- forming an optical coupler on a portion of the waveguide core, wherein the optical coupler comprises a semiconductor material, and the optical coupler is disposed between the portion of the waveguide core and the multi-layer quantum-well stack.
2 more elements
Dependencies are inferred from the claim text.