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US 12,585,042 B2Granted
Optical detector including plasmonic metasurfaces and bulk acoustic wave resonators
AssigneeTexas Instruments Incorporated
InventorsJeronimo Segovia Fernandez, Ting-Ta Yen, Hassan Omar Ali
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Abstract
An apparatus for an optical detector includes a bulk acoustic wave (BAW) resonator including a piezoelectric layer and a metal layer, an acoustic Bragg mirror on the BAW resonator and including a first acoustic impedance layer and a second acoustic impedance layer different than the first acoustic impedance layer, and a plasmonic metasurface on the acoustic Bragg mirror and including structures of geometric patterns arranged in an array.
Claims32
An apparatus, comprising:
- a substrate;
- a piezoelectric layer over the substrate;
- an acoustic reflector over the piezoelectric layer;
- and
- a first structure, a second structure, and a third structure over and on a same side of the piezoelectric layer, in which the piezoelectric layer and the acoustic reflector are between the first, second, and third structures and the substrate.
2 more elements
An optical device, comprising:
- a substrate;
- a plasmonic metasurface;
- a bulk acoustic wave (BAW) resonator;
- and
- a Bragg mirror, in which the BAW resonator and the Bragg mirror is between the plasmonic metasurface and the substrate.
2 more elements
An apparatus, comprising:
- a light detector including:
- a piezoelectric layer;
- an acoustic reflector;
- and
- a plurality of structures over the acoustic reflector and the piezoelectric layer configurable to receive light.
2 more elements
An apparatus comprising:
- a substrate;
- a piezoelectric layer over the substrate;
- an acoustic reflector;
- and
- a structure over the acoustic reflector, the structure configurable to absorb light of a particular frequency range, in which the acoustic reflector and the piezoelectric layer are between the structure and the substrate.
2 more elements
Dependencies are inferred from the claim text.