Optical component with an encapsulated metasurface and method for manufacturing such a component
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsThomas Perrillat-Bottonet, Sebastien Becker, Quentin Abadie
Life of this patent
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Abstract
A metasurface optical component including a first substrate, a set of subwavelength structures for forming a metasurface optic and a layer, referred to as an encapsulation layer, that is substantially parallel to the surface of the first substrate, the encapsulation layer being spaced apart from the set of structures by a space referred to as the encapsulated space, the encapsulation layer and the encapsulated space together forming a multilayer antireflective coating in the given wavelength range.
Claims16
A metasurface optical component, comprising:
- a first substrate, and
- a set of subwavelength structures arranged on a surface of the first substrate to form a metasurface optical component in a given wavelength range, and
- the metasurface optical component further including an encapsulation layer that is substantially parallel to the surface of the first substrate, the encapsulation layer having a thickness and being spaced apart from the set of subwavelength structures by an encapsulated space over a first distance, wherein
- the thickness of the encapsulation layer and the first distance are adapted so that the encapsulation layer and the encapsulated space together form a multilayer antireflective coating in the given wavelength range, and
- the subwavelength structures of the set of subwavelength structures have at least one feature, selected from a geometric dimension and a second distance with respect to adjacent subwavelength structures, that varies along the surface of the first substrate.
A method for manufacturing a metasurface optical component comprising the following steps:
- providing a first substrate,
- forming a set of subwavelength structures arranged on a first surface of the first substrate to form a metasurface optic in a given wavelength range, and
- providing an encapsulation layer, the encapsulation layer being substantially parallel to the surface of the first substrate and having a thickness, and the encapsulation layer being spaced apart from the set of subwavelength structures by an encapsulated space, over a first distance, wherein
- when providing the encapsulation layer, the thickness of the encapsulation layer and the first distance are adapted so that the encapsulation layer and the encapsulated space together form a multilayer antireflective coating in the given wavelength range, and
- the subwavelength structures of the set of subwavelength structures have at least one feature, selected from a geometric dimension and a second distance with respect to adjacent subwavelength structures, that varies along the surface of the first substrate.
Dependencies are inferred from the claim text.