Magnetic sensor device and method of manufacturing the same
AssigneeTDK Corporation
InventorsKazuma Yamawaki, Shuhei Miyazaki
Life of this patent
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Abstract
A magnetic sensor device includes a stacked structure including a sensor substrate and a sensor element circuitry. The sensor substrate has a surface and a perimeter. The sensor element circuitry is provided on the surface of the sensor substrate, has a perimeter, and includes one or more magnetic sensor elements. As viewed in a plane parallel to the surface, a portion or all of the perimeter of the sensor element circuitry is located at a position different from a position of the perimeter of the sensor substrate.
Claims17
A magnetic sensor device comprising
- a stacked structure including a sensor substrate and a sensor element circuitry, the sensor substrate having a surface and a perimeter, the sensor element circuitry being provided on the surface of the sensor substrate, having a perimeter, and including one or more magnetic sensor elements,
- wherein as viewed in a plane parallel to the surface, a portion or all of the perimeter of the sensor element circuitry is located at a position different from a position of the perimeter of the sensor substrate,
- the stacked structure has a perimeter, and
- Expression (1) below is satisfied in a portion or all of the perimeter of the stacked structure:
- 0 percent<|L1−L2|/L1<1.56 percent (1)
- where L1 represents a length of the sensor substrate in a first direction along the surface, and L2 represents a length of the sensor element circuitry in the first direction.
A magnetic sensor device comprising
- a stacked structure including a sensor substrate and a sensor element circuitry, the sensor substrate having a surface and a perimeter, the sensor element circuitry being provided on the surface of the sensor substrate, having a perimeter, and including one or more magnetic sensor elements,
- wherein as viewed in a plane parallel to the surface, a portion or all of the perimeter of the sensor element circuitry is located at a position different from a position of the perimeter of the sensor substrate,
- the stacked structure has a perimeter, and
- a distance from the perimeter of the sensor substrate to the perimeter of the sensor element circuitry in a first direction along the surface is greater than 0 micrometers and less than or equal to 5 micrometers in a portion or all of the perimeter of the stacked structure.
A magnetic sensor device comprising
- a stacked structure including a sensor substrate and a sensor element circuitry, the sensor substrate having a surface and a perimeter, the sensor element circuitry being provided on the surface of the sensor substrate, having a perimeter, and including one or more magnetic sensor elements,
- wherein as viewed in a plane parallel to the surface, a portion or all of the perimeter of the sensor element circuitry is located at a position different from a position of the perimeter of the sensor substrate,
- wherein Expression (2) below is satisfied:
- 0.5<(T2/T1)<3 (2)
- where T1 represents a thickness of the sensor substrate, and T2 represents a thickness of the sensor element circuitry.
Dependencies are inferred from the claim text.