Source measure device

A source measure device, comprising:

• a current sampling circuit coupled to a first terminal of a device under test and configured to sample a current provided to the first terminal of the device under test;
• a voltage sampling circuit coupled to the device under test through a first sensing terminal and a second sensing terminal and configured to sample a voltage across the first sensing terminal and the second sensing terminal;
• an overvoltage detecting circuit coupled to the current sampling circuit and the voltage sampling circuit, and receiving a first operation voltage and a second operation voltage to generate a detection voltage, wherein the first operation voltage is generated by the current sampled by the current sampling circuit following a first resistor, and the second operation voltage is generated based on the voltage sampled by the voltage sampling circuit 1;
• and
• a comparing circuit coupled to the overvoltage detecting circuit, and determining whether the detection voltage is within a voltage range, if the detection voltage is not within the voltage range, the comparing circuit generates an abnormal signal.