Measurement system with detection mechanism and method of operation thereof

A method of operation of a measurement system comprising:

• generating a microwave excitation towards a sample;
• scanning the sample along a path at a first vertical position relative to the sample;
• capturing a first microwave response along the path at the first vertical position based on the microwave excitation;
• generating a first channel voltage based on the first microwave response;
• scanning the sample along the path at a second vertical position relative to the sample;
• capturing a second microwave response along the path at the second vertical position based on the microwave excitation;
• generating a second channel voltage based on the second microwave response;
• and
• determining a voltage difference between the first channel voltage based on the first vertical position and the second channel voltage based on the second vertical position for characterizing the sample.

A non-transitory computer-readable medium storing an instruction that, when executed by a control circuit of a measurement system, causes the control circuit to perform functions comprising:

• generating a microwave excitation towards a sample;
• scanning the sample along a path at a first vertical position relative to the sample;
• capturing a first microwave response along the path at the first vertical position based on the microwave excitation;
• generating a first channel voltage based on the first microwave response;
• scanning the sample along the path at a second vertical position relative to the sample;
• capturing a second microwave response along the path at the second vertical position based on the microwave excitation;
• generating a second channel voltage based on the second microwave response;
• and
• determining a voltage difference between the first channel voltage based on the first vertical position and the second channel voltage based on the second vertical position for characterizing the sample.