Accelerometer having a differential capacitance between detecting plates and detecting electrodes

An accelerometer, comprising:

• a substrate provided with a plurality of anchor points, the anchor points at least comprising supporting anchor points and electrode fixing anchor points which are arranged adjacently;
• and
• detecting devices, each comprising two detecting plates and corresponding detecting electrodes, the detecting electrodes being connected to the electrode fixing anchor points through connecting arms, and the corresponding detecting plate being elastically connected to the supporting anchor point adjacent to the electrode fixing anchor points, to reduce the influence of deformation of the substrate on a relative distance between the detecting plate and the detecting electrode;
• the two detecting plates being asymmetrically arranged with respect to axes of the supporting anchor points to which the detecting plates are connected, and structurally asymmetric parts of the two detecting plates being parallel to each other and in opposite directions;
• the two detecting plates being used for accessing carrier driving signals with opposite phases and forming a differential driving detection structure, the detecting electrodes and the detecting plates being arranged at intervals to form a detecting capacitor, and the detecting electrodes comprising in-plane detecting electrodes and out-of-plane detecting electrodes;
• wherein the accelerometer is provided with two said detecting devices, the two detecting devices are located in a same plane, the detecting plates in the two detecting devices are perpendicular to each other, and the two detecting plates in the same detecting device are adjacently arranged;
• when the accelerometer is used for detection, the two detecting plates in the same detecting device generate opposite changes in distance with respect to the detecting electrodes respectively;
• and the accelerometer obtains a detection result by analyzing a change of differential capacitance between the detecting plates and the detecting electrodes.