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US 12,584,885 B2Granted
Material measuring device, material measuring system and material measuring method
AssigneeDaegu Gyeongbuk Institute of Science and Technology
InventorsHoe Joon Kim, Il Ryu Jang, Soon In Jung
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Abstract
The present invention relates to a surface acoustic wave-based material measuring device, material measuring system, and material measuring method, and more particularly, to a technique of accurately and reliably measuring various inherent physical properties of temperature and frequency-dependent materials by generating multiple resonant waves.
Claims16
A particle material measuring device comprising:
- a piezoelectric substrate including a sensing region;
- and
- first to n-th electrode modules provided on one surface of the piezoelectric substrate,
- wherein each of the first to n-th electrode modules includes first and second comb electrodes that are a comb-shaped electrode pair opposing each other based on the sensing region, and
- the piezoelectric substrate is formed of a piezoelectric material that is excited by the first to n-th electrode modules to generate a surface acoustic wave (where n is a natural number greater than 1),
- wherein the first to n-th electrode modules are radially arranged around the sensing region.
3 more elements
A particle material measuring system comprising:
- the particle material measuring device comprising a piezoelectric substrate including a sensing region and first to n-th electrode modules provided on one surface of the piezoelectric substrate, wherein each of the first to n-th electrode modules includes first and second comb electrodes that are a comb-shaped electrode pair opposing each other based on the sensing region, and the piezoelectric substrate is formed of a piezoelectric material that is excited by the first to n-th electrode modules to generate a surface acoustic wave (where n is a natural number greater than 1);
- a power supply module supplying power to at least one of the first to n-th electrode modules;
- and
- a signal processing module receiving a signal from at least one of the first to n-th electrode modules and calculating physical properties of a measurement object provided in the sensing region,
- wherein
- the piezoelectric substrate is excited by the first to n-th electrode modules to generate a surface acoustic wave having multiple resonance frequencies.
3 more elements
Dependencies are inferred from the claim text.