Information processing apparatus, information processing method, nontransitory computer readable media storing program, and X-ray analysis apparatus

An information processing apparatus comprising:

• an X-ray analysis apparatus including an X-ray source and a detector;
• and
• a processor,
• wherein the X-ray source irradiates a thin film with X-rays,
• wherein the detector detects a reflected intensity of X-rays from the thin film,
• wherein the processor is configured to execute a program so as to output a parameter result in relation to a thin film by inputting, to a neural network, a profile result in relation to a reflected intensity of X-rays from the thin film in a reflectance measurement using the X-ray analysis apparatus, the profile result being generated based on the detected reflected intensity of X-rays,
• wherein the neural network is a neural network that has been trained through machine learning based on teacher data using profile data in relation to a reflected intensity of X-ray from a thin film as input data and using parameter data in relation to the thin film as output data,
• wherein the parameter data and the parameter result are information in relation to at least one of film thickness, density, and roughness of a thin film, and
• wherein the parameter result is initial value information located within a parameter region enclosed by an ellipse formed around a correct solution parameter,
• wherein the processor is further configured to
• execute the program so as to obtain the correct solution parameter by optimizing the initial value information, and
• output the parameter result as an analysis result of a physical property of the thin film.