Measurement system with detection mechanism and method of operation thereof
AssigneePark Systems Corp.
InventorsHanaul Noh, Chih-Chieh Hsieh, Myunghoon Choi, Stefan Kaemmer
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Abstract
A method of operation of a measurement system includes: generating a microwave excitation to a sample; capturing a microwave response from the sample based on the microwave excitation; generating a baseband voltage based on the microwave response; determining a sense voltage based on the baseband voltage; generating an amplifier output voltage based on the sense voltage; and generating a channel output voltage based on the amplifier output voltage in a frequency range from a direct-current (DC) value to a predefined frequency value for characterizing the sample.
Claims20
A measurement system comprising:
- an excitation unit configured to generate a microwave excitation to a sample;
- a probe, coupled to the excitation unit, configured to capture a microwave response from the sample based on the microwave excitation;
- and
- an impedance detection unit, coupled to the probe, configured to:
- generate a baseband voltage based on the microwave response,
- determine a sense voltage based on the baseband voltage,
- generate an amplifier output voltage based on the sense voltage, and
- generate a channel output voltage based on the amplifier output voltage in a frequency range from a direct-current (DC) value to a predefined frequency value for characterizing the sample.
A method of operation of a measurement system comprising:
- generating a microwave excitation to a sample;
- capturing a microwave response from the sample based on the microwave excitation;
- generating a baseband voltage based on the microwave response;
- determining a sense voltage based on the baseband voltage;
- generating an amplifier output voltage based on the sense voltage;
- and
- generating a channel output voltage based on the amplifier output voltage in a frequency range from a direct-current (DC) value to a predefined frequency value for characterizing the sample.
A non-transitory computer-readable medium storing an instruction that, when executed by a control circuit of a measurement system, causes the control circuit to perform functions comprising:
- generating a microwave excitation to a sample;
- capturing a microwave response from the sample based on the microwave excitation;
- generating a baseband voltage based on the microwave response;
- determining a sense voltage based on the baseband voltage;
- generating an amplifier output voltage based on the sense voltage;
- and
- generating a channel output voltage based on the amplifier output voltage in a frequency range from a direct-current (DC) value to a predefined frequency value for characterizing the sample.
Dependencies are inferred from the claim text.