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US 12,584,865 B2Granted
Defect inspection device and method for inspecting defect
AssigneeSamsung Display Co., Ltd.
InventorsJeong Moon Lee, Dae Hong Kim
Life of this patent
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Abstract
A defect inspection device according to one or more embodiments includes an inspection device for detecting a defect by line-scanning an object, and for generating review image data for the defect, a height measurer for acquiring a reference height of the defect and a height of the defect, and for generating height data of the defect, and a defect classifier for classifying the defect based on the review image data and the height data.
Claims17
A defect inspection device comprising:
- an inspection device having an inspection optical module for detecting a defect by line-scanning an object in a scan direction, and for generating review image data for the defect, the review image data corresponding to at least one of a plan shape or width of the defect;
- a height measurer having a measuring optical module for acquiring a reference height of the defect and a height of the defect, and for generating height data of the defect, the height of the defect extending between a top of the defect and a bottom of the defect;
- and
- a defect classifier for classifying the defect based on the review image data and the height data by using one or more machine learning techniques,
- wherein the inspection optical module and the measuring optical module each comprise at least one light source and at least one sensor, and
- wherein the measuring optical module is configured to concurrently move in the scan direction with the inspection optical module.
3 more elements
A method for inspecting a defect, the method comprising:
- detecting the defect by line-scanning an object by moving an inspection optical module in a scan direction;
- measuring a reference height of the defect by moving a measuring optical module concurrently with the moving of the inspection optical module in the scan direction;
- generating review image data corresponding to at least one of a plan shape or width of the defect by imaging the defect;
- measuring a height of the defect extending between a top of the defect and a bottom of the defect;
- generating height data of the defect for the reference height;
- and
- classifying the defect based on the review image data and the height data by using one or more machine learning techniques,
- wherein the inspection optical module and the measuring optical module each comprise at least one light source and at least one sensor.
5 more elements
Dependencies are inferred from the claim text.