Semiconductor device and method of determining temperature of semiconductor device

A semiconductor device, comprising:

• a first die having a device region and an isolation region, comprising:
• at least one first device in the device region, wherein the at least one first device comprises an integrated circuit or a logic device;
• a first sensor in the device region, configured to sense a first device temperature of the at least one first device, comprising a first resistor with a first non-linear temperature resistance curve and a second resistor with a second non-linear temperature resistance curve, wherein the first device temperature is linearly related to a difference between a first resistance of the first resistor at the first device temperature and a second resistance of the second resistor at the first device temperature;
• and
• a reference sensor in the isolation region, configured to sense an ambient temperature, comprising a third resistor with the first non-linear temperature resistance curve and a fourth resistor with the second non-linear temperature resistance curve, wherein the ambient temperature is linearly related to a difference between a third resistance of the third resistor at the ambient temperature and a fourth resistance of the fourth resistor at the ambient temperature.

A method of determining a temperature of a semiconductor device, comprising:

• providing a first die, the first die comprising:
• at least one first device, wherein the at least one first device comprises an integrated circuit or a logic device;
• and
• a first sensor aside the at least one first device, comprising a first resistor with a first non-linear temperature resistance curve and a second resistor with a second non-linear temperature resistance curve;
• sensing a first resistance of the first resistor and a second resistance of the second resistor;
• subtracting the first resistance of the first resistor from the second resistance of the second resistor to obtain a first resistance difference, wherein the first resistance difference is linearly related to a first device temperature of the at least one first device;
• and
• sensing an ambient temperature through a reference sensor, wherein a distance between the reference sensor and the at least one first device is larger than a distance between the first sensor and the at least one first device.