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US 12,584,487 B2Granted
Turbomolecular vacuum pump and methods for manufacturing a rotor
AssigneePfeiffer Vacuum GmbH
InventorNicolas Varennes
Life of this patent
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Abstract
A turbomolecular vacuum pump including a stator and a rotor designed to rotate in the stator. The rotor includes a hub and at least one blade stage including blades distributed regularly about the periphery of the hub. The blades of at least one blade stage of the rotor are hollow.
Claims13
A turbomolecular vacuum pump, comprising:
- a stator and a rotor configured to rotate in the stator, the rotor comprising a hub and at least one blade stage comprising blades distributed regularly about the periphery of the hub,
- wherein the blades of at least one blade stage of the rotor are hollow,
- wherein the at least one blade stage of the rotor with hollow blades is made by metal additive manufacturing, and
- wherein radial ends of the hollow blades made by metal additive manufacturing are open.
1 more element
A turbomolecular vacuum pump, comprising:
- a stator and a rotor configured to rotate in the stator, the rotor comprising a hub and at least one blade stage comprising blades distributed regularly about the periphery of the hub,
- wherein the blades of at least one blade stage of the rotor are hollow,
- wherein a thickness of a respective skin of each of the hollow blades is equal to or less than 3 mm and equal to or greater than 0.2 mm.
Dependencies are inferred from the claim text.