Low mass substrate support

A substrate support, comprising:

• a disk-shaped body, comprising:
• a first surface having a first raised circular ring disposed adjacent to a circumference of an outer edge of the disk-shaped body and defining a first side pocket comprising one or more grooves extending in a line from the first raised circular ring toward a center of the disk-shaped body, the first raised circular ring having a first radial width between the outer edge of the disk-shaped body and a radially-inward edge of the first raised circular ring;
• a second surface opposite the first surface on the disk-shaped body having a second raised circular ring disposed about the circumference of the disk-shaped body and defining a second side pocket, the second raised circular ring having a second radial width between the outer edge of the disk-shaped body and a radially-inward edge of the second raised circular ring;
• a plurality of lift pin openings formed through the disk-shaped body and positioned a first distance from center of the disk-shaped body;
• and
• a plurality of slots positioned on the second surface, the plurality of slots being radially aligned with the lift pin openings and positioned at a second radial distance from the center of the disk-shaped body, wherein the second radial distance is less than the circumference of the disk-shaped body and greater than the first distance.

A processing chamber comprising:

• an upper window and a lower window defining a process volume;
• and
• a substrate support disposed within the processing volume, comprising:
• a disk-shaped body having a center located at an axial centerline of the disk-shaped body;
• and
• a frontside ring integrally formed on a frontside of the disk-shaped body;
• a front side pocket defined by the frontside of the disk-shaped body and a first radially-inward edge of the frontside ring, the frontside ring comprising one or more grooves extending in a line from the frontside ring toward the center of the disk-shaped body;
• a backside ring integrally formed on a backside of the disk-shaped body, wherein the frontside ring and the backside ring have a first thickness;
• a backside pocket defined by the backside of the disk-shaped body and a second radially-inward edge of the ring;
• a plurality of lift pin openings extending through the disk-shaped and positioned at a first radial distance from the center of the disk-shaped body;
• and
• a plurality of slots positioned on the backside at a second radial distance from the center of the disk-shaped body, the second radial distance being greater than the first radial distance.