US 12,584,236 B2 · Chamber coating material and method for manufacturing the same

Abstract

A method for manufacturing a coating material formed on an inner surface of a chamber is provided. The method includes: i) providing a substrate including at least one material selected from the group consisting of SiC, SiO2, and Al2O3; ii) providing a first coating portion including SiOx (0.1≤x≤2 as a molar ratio) or AlOy (0.1≤y≤1.5 as a molar ratio) on the substrate; iii) providing a second coating portion including YOz (0.1≤z≤1.5 as a molar ratio) on the first coating portion; iv) providing a laminate in which the first coating portion and the second coating portion are repeatedly stacked; and v) heating the laminate to provide a coating layer of a single crystalline layer by a solid-state reaction between the first coating portion and the second coating portion.

Claims10

Dependent claims

A method for manufacturing a coating material formed on an inner surface of a chamber, the method comprising:

providing a substrate comprising at least one material selected from the group consisting of SiC, SiO2, and Al2O3;
providing a first coating portion with a thickness of 0.4 μm to 1 μm comprising AlOy (0.1≤y≤1 as a molar ratio) on the substrate by physical vapor deposition;
providing a second coating portion with a thickness of 0.5 μm to 2.5 μm comprising YOz (0.1≤z≤1 as a molar ratio) on the first coating portion by physical vapor deposition;
providing a laminate in which the first coating portion and the second coating portion are repeatedly stacked;
and
heating the laminate to provide a coating layer of a single crystalline layer by a solid-state reaction between the first coating portion and the second coating portion.

3 more elements

Dependencies are inferred from the claim text.

Chamber coating material and method for manufacturing the same

Life of this patent

Chamber coating material and method for manufacturing the same

Life of this patent

Abstract

Claims10