Deposition apparatus

A deposition apparatus for depositing a deposition material on a base substrate disposed on a mask, the deposition apparatus comprising:

• a mask assembly including a mask frame which defines an opening therein and surrounds the opening, and the mask disposed on the mask frame;
• an electrostatic chuck disposed on the base substrate;
• and
• a plate disposed on the electrostatic chuck,
• wherein the plate and the electrostatic chuck are independently movable from each other,
• wherein the plate includes a permanent magnet, and the electrostatic chuck includes a plurality of magnetic bodies, and
• wherein a magnetic property of at least one magnetic body among the plurality of magnetic bodies is different from a magnetic property of remaining magnetic bodies except for the at least one magnetic body among the plurality of magnetic bodies.