Composition for forming organic film, patterning process, and compound
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsDaisuke Kori, Shohei Iwamori
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorsDaisuke Kori, Shohei Iwamori
Estimating the term…
A composition for forming an organic film, including: a compound represented by the following general formula (1); and an organic solvent, wherein in the general formula (1), X represents any one group of X1 to X3 represented by the following general formulae (2), (3), and (5), and two or more kinds of X are optionally used in combination, wherein in the general formula (3), W represents a carbon atom or a nitrogen atom; “n1” represents 0 or 1; “n2” represents an integer of 1 to 3; and R1 independently represents any one of groups represented by the following general formula (4), and wherein in the general formula (5), R2 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms; and R3 represents any one of the following groups.
A composition for forming an organic film, comprising:
A compound represented by the following general formula (1),
Dependencies are inferred from the claim text.