MEMS speaker

Abstract

The present disclosure provides a MEMS speaker including a supporting member, a diaphragm used for emitting an amplitude-modulated ultrasonic wave, and an acoustic valve. The supporting member includes a supporting body and an acoustic hole, the acoustic valve includes a valve body fixed with a peripheral side of the supporting body and located in the acoustic hole and a variable section valve hole permeating from one end of the valve body to the other end thereof, the diaphragm is fixed with an inner peripheral side of the supporting body and located in the acoustic hole, the variable section valve hole allows the amplitude-modulated ultrasonic wave passing through the variable section valve hole to produce a modulated acoustic wave. Compared with the related art, the MEMS speaker could enhance the efficiency and amplitude of acoustic wave demodulation, and the acoustic performance could be enhanced.

Dependencies are inferred from the claim text.