Transfer system and transfer method
AssigneeKabushiki Kaisha Yasakawa Denki
InventorMakoto Taruno
Life of this patent
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Abstract
A transfer system includes a robot and a controller that controls an operation of the robot. The robot includes a hand that transfers a substrate, and a lift mechanism that moves up and down the hand. The hand includes a sensor that detects a distance to a lower surface of the substrate. The controller includes a storage unit, a detection unit, and a calculation unit. The storage unit stores placement information including a placement height at a placement position of the substrate. The detection unit detects a separation height at which the substrate is separated from the hand when the hand is moved down from the placement height. The calculation unit calculates a deflection amount of the substrate based on a difference between the placement height and the separation height.
Claims14
A transfer system comprising:
- a robot;
- a support on which a substrate is disposed;
- and
- a controller configured to control an operation of the robot,
- wherein the robot includes:
- a hand configured to transfer the substrate;
- and
- a lift configured to move up and down the hand,
- wherein the hand includes:
- a sensor configured to detect a distance to a lower surface of the substrate, and
- wherein the controller includes:
- a storage configured to store placement information including a placement height of the substrate disposed on the support, the placement height indicating a height of an upper surface of the support at a placement position,
- a detection circuitry configured to detect a separation height at which the substrate is separated from the hand when the hand is moved down from the placement height, based on a height corresponding to an upper surface of the hand and a detection range of the sensor in a vertical direction, and
- a calculation circuitry configured to calculate a deflection amount of the substrate based on a difference between the placement height and the separation height.
A transfer method comprising:
- providing a transfer system including a robot, a support on which a substrate is disposed, and a controller that controls an operation of the robot, the robot including a hand that transfers the substrate and a lift that moves up and down the hand, and the hand including a sensor that detects a distance to a lower surface of the substrate;
- storing placement information including a placement height of the substrate disposed on the support, the placement height indicating a height of an upper surface of the support at a placement position;
- detecting a separation height at which the substrate is separated from the hand when the hand is moved down from the placement height, based on a height corresponding to an upper surface of the hand and a detection range of the sensor in a vertical direction;
- and
- calculating a deflection amount of the substrate based on a difference between the placement height and the separation height.
Dependencies are inferred from the claim text.