Workpiece processing apparatus

A workpiece processing apparatus comprising:

• two workpiece conveyance robots configured to travel on the same traveling table and carry a workpiece into and out of a processing section;
• and
• a control device configured to perform movement control of the workpiece conveyance robot,
• wherein the two workpiece conveyance robots include a first robot and a second robot, and
• the control device includes a first determination section configured to:
• determine, prior to executing a movement control instruction for the first robot, whether the first robot is permitted to move, based on a first difference between:
• a first robot next instruction value, which is an instruction value indicating a movement destination position of the first robot associated with a movement control instruction issued to the first robot immediately after a determination start time, and
• a second robot movement destination position, which is a value associated with a movement control instruction already being executed by the second robot at the determination start time and indicating a movement destination position of the second robot,
• determine a movability of the first robot by the movement control instruction based on whether the first difference is greater than a predetermined threshold distance, and
• when the movability is determined to be permitted, control the first robot to move to the movement destination position based on the movement control instruction,
• wherein the predetermined threshold distance is set based on a difference between a current position of the first robot and the first robot next instruction value.