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US 12,583,077 B2Granted
Production apparatus and production method
AssigneeKioxia Corporation
InventorKazufumi Nomura
Life of this patent
Estimating the term…
Abstract
A production apparatus includes: a rotating body configured to rotate a grindstone to cut a first surface of an object; a holding unit configured to contact a second surface of the object; and a displacement unit configured to displace at least a portion of the second surface of the object in a rotation axis direction of the rotating body.
Claims10
A production apparatus comprising:
- a rotating body configured to rotate a grindstone to cut a first surface of an object;
- a chuck table configured to contact a second surface of the object;
- and
- a displacement portion in contact with a central portion of the second surface of the object and configured to displace at least a portion of the second surface of the object in a rotation axis direction of the rotating body.
1 more element
A production method comprising:
- cutting a first surface of an object by rotating a grindstone, with a second surface of the object being held;
- acquiring information indicating a cutting amount in a plurality of positions on the first surface;
- with a central portion of the second surface of the object or at least one portion of a second surface of a second object being in contact with a displacement portion, displacing the second surface of the object or the at least one portion of the second surface of the second object in a rotation axis direction of the grindstone based on the acquired information;
- and
- cutting the first surface of the object or a first surface of the second object by rotating the grindstone with the displaced second surface of the object being held or with the displaced second surface of the second object being held.
2 more elements
Dependencies are inferred from the claim text.