Filter module
AssigneeEntegris, Inc.
InventorsMatthew A. Fuller, Colton J. Harr
Life of this patent
Estimating the term…
Abstract
A filter module includes an interface body and a filter retention body. A filter can be disposed between the filter retention body and a filter retainer joined to the filter retention body. The filter retention body can further include a valve. The filter retainer can be joined to the filter retention body by a snap fit, a press-fit, or a weld. The filter retainer can include stand-offs configured to contact the filter such that the filter is held away from the filter grill. The filter module can be used for providing purge in a wafer container such as a front opening unified pod (FOUP).
Claims6
A substrate container, comprising:
- a substrate container body defining an internal space, the substrate container including a gas exchange port;
- a gas exchange module disposed in the gas exchange port, the gas exchange module including:
- a filter housing;
- an interface body including a bore configured to receive the filter housing;
- a filter disposed at an end of the filter housing;
- and
- a filter retainer joined to the filter housing;
- wherein the interface body is configured to form a seal at a perimeter of the gas exchange port when the gas exchange module is disposed in the gas exchange port,
- wherein the filter retainer includes a retention element provided in an opening defined by the filter retainer, the retention element including a plurality of pairs of spokes, each of the plurality of pairs of spokes extending towards a center, the center defining a passage;
- each of the plurality of spokes including a filter retention beam configured to contact the filter,
- wherein a total surface area of the filter retention beams is less than a total surface area of the retention element.
Dependencies are inferred from the claim text.