Protective film forming agent, and method for producing semiconductor chip
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorTetsuro Kinoshita
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Abstract
A protective film forming agent that, in dicing of a semiconductor wafer, is used to form a protective film on the surface of the semiconductor wafer, can form a protective film that has excellent laser processability, and has excellent solubility of a light-absorbing agent; and a method for producing a semiconductor chip using the protective film forming agent. The protective film forming agent includes a water-soluble resin, a light-absorbing agent, a basic compound, and a solvent. The basic compound is an alkylamine, an alkanolamine, an imidazole compound, ammonia, or an alkali metal hydroxide. The light-absorbing agent content of the protective film forming agent is 0.1-10 mass % (inclusive).
Claims5
A protective film forming agent for forming a protective film on a surface of a semiconductor wafer in dicing of the semiconductor wafer, the protective film forming agent comprising:
- a water-soluble resin (A), a light-absorbing agent (B), a basic compound (C), and a solvent(S),
- wherein a content of the basic compound (C) is 0.11% by mass or more and 0.43% by mass or less,
- the water-soluble resin (A) comprises polyvinylpyrrolidone or hydroxypropyl cellulose,
- the light-absorbing agent (B) is a compound represented by formula (B1) or formula (B2),
- wherein in formula (B1), R1 and R3 are each independently a hydroxy group or a carboxy group, R2 and R4 are each independently a hydroxy group or a group represented by —NR5R6, R5 and R6 are each independently a hydrogen atom or an alkyl group having 1 or more and 4 or less carbon atoms, and m and n are each independently an integer of 0 or more and 2 or less,
- wherein in formula (B2), R11 is a group represented by —NR12R13, R12 and R13 are each independently a hydrogen atom or an alkyl group having 1 or more and 4 or less carbon atoms, p is an integer of 0 or more and 3 or less, and when p is 2 or more, a plurality of R11s may be the same or different,
- wherein the basic compound (C) comprises one selected from the group consisting of monoethanolamine, diethanolamine, imidazole, ammonia, and NaOH.
Dependencies are inferred from the claim text.