Carrier substrate, laminate, and method for manufacturing electronic device
AssigneeAGC Inc.
InventorsKazutaka Ono, Takatoshi Yaoita, Reo Usui, Kenichi Ebata, Jun Akiyama
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Abstract
A carrier substrate to be used, when manufacturing a member for an electronic device on a surface of a substrate, by being bonded to the substrate, includes at least a first glass substrate. The first glass substrate has a compaction described below of 80 ppm or less. Compaction is a shrinkage in a case of subjecting the first glass substrate to a temperature raising from a room temperature at 100° C./hour and to a heat treatment at 600° C. for 80 minutes, and then to a cooling to the room temperature at 100° C./hour.
Claims5
A method for manufacturing an electronic device, the method comprising:
- forming a member for an electronic device on a surface of a substrate of a laminate comprising a carrier substrate and the substrate formed on the carrier substrate to obtain a member for an electronic device-attached-laminate;
- and
- removing the carrier substrate from the member for an electronic device-attached-laminate to obtain an electronic device having the substrate and the member for an electronic device,
- wherein the carrier substrate comprises at least a first glass substrate,
- the first glass substrate has a compaction of from 20 to 80 ppm, wherein the compaction is determined as a shrinkage when subjecting the first glass substrate to a temperature raising from a room temperature at 100° C./hour and to a heat treatment at 600° C. for 80 minutes, and then to a cooling to the room temperature at 100° C./hour,
- the first glass substrate comprises a glass comprising, in terms of mass percentages based on oxides, the following:
- from 57% to 62.1% of SiO2,
- from 19% to 24% of Al2O3,
- from 2.6% to less than 5% of B2O3,
- from 2% to 6% of MgO,
- from 4.1% to 7% of CaO,
- from 2.3% to 9% of SrO,
- from 1% to 10% of BaO, and
- from 14% to 16% of MgO+CaO+SrO+BaO, and
- the first glass substrate has a strain point of at least 700° C.
Dependencies are inferred from the claim text.