Semiconductor device, method of manufacturing the same, and electronic apparatus including the device

A semiconductor device, comprising:

• an active region extending substantially in a vertical direction on a substrate;
• a gate stack formed around at least a portion of an outer periphery of a middle section of the active region in the vertical direction, wherein the active region comprises a first source/drain region, a second source/drain region, and a channel region, the channel region is opposite to the gate stack, and the first source/drain region and the second source/drain region are located on two opposite sides of the channel region in the vertical direction;
• and
• a first spacer and a second spacer, the first spacer is located between a conductor layer of the gate stack and the first source/drain region, and the second spacer is located between the conductor layer of the gate stack and the second source/drain region,
• wherein each of the first spacer and the second spacer comprises a first portion extending substantially in a lateral direction, and a second portion extending substantially in the vertical direction from the first portion to a direction away from the gate stack;
• wherein a corner formed by the first portion and the second portion of each of the first spacer and the second spacer surrounds a corner portion of the active region opposite to the gate stack;
• wherein the gate stack comprises a gate dielectric layer, a work function adjustment layer, and a gate electrode material layer, and the conductor layer is the gate electrode material layer;
• wherein the work function adjustment layer is respectively connected with the first spacer and the second spacer to space the conductor layer from the channel region;
• and
• wherein the first source/drain region, the channel region and the second source/drain region are sequentially arranged in a direction away from the substrate, and the gate dielectric layer extends along a surface of the second source/drain region away from the channel region.