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US 12,581,632 B2Granted
Mapping device including electrostatic chuck and anti- separation frame
AssigneeSamsung Display Co., Ltd.
InventorsMyungkyu Kim, Kyongho Hong, Chang-Kon Park, Sukbeom You, Dongjae Lee
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Abstract
A mapping device includes: a substrate engraved with an alignment pattern; an electrostatic chuck under the substrate and in contact with the substrate; and an anti-separation frame on the substrate and preventing the substrate from being separated.
Claims10
A mapping device comprising:
- a substrate engraved with an alignment pattern;
- an electrostatic chuck under the substrate and in contact with the substrate;
- and
- an anti-separation frame on the substrate for preventing movement of the substrate,
- wherein the anti-separation frame comprises:
- a first frame overlapping a center portion of the substrate and extending in a first direction;
- and
- a second frame overlapping the center portion of the substrate and extending in a second direction crossing the first direction such that the first frame and the second frame cross each other.
5 more elements
Dependencies are inferred from the claim text.