Exit channel configuration for MEMS-based actuator systems

A cooling system, comprising:

• a plurality of cooling cells, each of the plurality of cooling cells including a bottom plate, a support structure, and a cooling element, the cooling element having a central region and a perimeter, the cooling element being supported by the support structure at the central region, at least a portion of the perimeter being unpinned such that the cooling element includes at least one cantilevered arm, the at least one cantilevered arm of the cooling element being configured to undergo vibrational motion when actuated to drive a fluid for cooling a heat-generating structure, the bottom plate having a plurality of orifices and at least one cavity therein, the at least one cavity being adjacent to and fluidically connected with the plurality of orifices, a gap being between a first portion of the bottom plate and a portion of the heat-generating structure, the gap and at least one of the plurality of orifices or the at least one cavity defining an orifice distance between a second portion of the bottom plate adjoining an orifice of the plurality of orifices and the heat-generating structure and an orifice length for the orifice within the bottom plate.

A method of cooling a heat-generating structure, comprising:

• driving a cooling element to induce a vibrational motion at a frequency, the cooling element being part of a cooling cell, the cooling cell including a support structure, the cooling element and a bottom plate, the cooling element having a central region and a perimeter, the cooling element being supported by the support structure at the central region, at least a portion of the perimeter being unpinned such that the cooling element includes at least one cantilevered arm, the at least one cantilevered arm of the cooling element being configured to undergo vibrational motion when actuated to drive a fluid for cooling the heat-generating structure, the bottom plate having a plurality of orifices and at least one cavity therein, the at least one cavity being adjacent to and fluidically connected with the plurality of orifices, a gap being between a first portion of the bottom plate and a portion of the heat-generating structure, the gap and at least one of the plurality of orifices or the at least one cavity defining an orifice distance between a second portion of the bottom plate adjoining an orifice of the plurality of orifices and the heat-generating structure and an orifice length for the orifice within the bottom plate.