Anchor configurations for an array of ultrasonic transducers

An ultrasonic transducer device comprising:

• a substrate;
• a first support anchor coupled to the substrate;
• a second support anchor coupled to the substrate;
• at least one external anchor coupled to the substrate;
• and
• a membrane connected to the first support anchor, the second support anchor, and the at least one external anchor, wherein a sensing region of the ultrasonic transducer device is defined by the first support anchor and the second support anchor, the membrane configured to allow movement at ultrasonic frequencies, the membrane comprising:
• a first piezoelectric layer having a first surface and a second surface;
• a second piezoelectric layer having a first surface and a second surface;
• a buffer layer positioned between the first piezoelectric layer and the second piezoelectric layer, wherein a first surface of the buffer layer is coupled to the second surface of the first piezoelectric layer and the second surface of the buffer layer is coupled to the first surface of the second piezoelectric layer;
• a first electrode routed through at least a first via of the second piezoelectric layer, wherein the first via is between the at least one external anchor and the first support anchor such that the first electrode is between the second piezoelectric layer and the buffer layer overlying the first support anchor;
• and
• a second electrode routed through at least a second via of the second piezoelectric layer and the buffer layer, such that the second electrode is between the first piezoelectric layer and the buffer layer in the sensing region.