Processing apparatus

A processing apparatus comprising:

• a holding unit for holding a workpiece thereon;
• a processing unit for processing the workpiece held on the holding unit;
• a moving mechanism for moving the holding unit and the processing unit relatively to each other;
• a processed state measuring unit for measuring a processed state of the workpiece;
• and
• a controller for controlling the processing unit, the moving mechanism, and the processed state measuring unit,
• wherein the controller acquires processed state information of the workpiece from the processed state measuring unit, acquires vibration information regarding vibrations that are being produced while the processed state information is acquired, links the processed state information and the vibration information that have been acquired with each other, and stores the processed state information and the vibration information that have been linked with each other, wherein the vibration information is represented by an operation state of the processing apparatus, and
• wherein the controller acquires again processed state information if the controller decides that the acquired vibration information is represented by a predetermined operation state.

A processing apparatus comprising:

• a holding unit for holding a workpiece thereon;
• a processing unit for processing the workpiece held on the holding unit;
• a moving mechanism for moving the holding unit and the processing unit relatively to each other;
• a processed state measuring unit for measuring a processed state of the workpiece;
• a vibration measuring unit for measuring vibration data representing vibration information associated with the processed state of the workpiece;
• and
• a controller for controlling the processing unit, the moving mechanism, the vibration measuring unit and the processed state measuring unit,
• wherein the controller acquires processed state information of the workpiece from the processed state measuring unit, acquires vibration information regarding vibrations that are being produced while the processed state information is acquired, links the processed state information and the vibration information that have been acquired with each other, and stores the processed state information and the vibration information that have been linked with each other and acquires again processed state information if the controller decides that a vibration value is equal to or larger than an allowable value, from the acquired vibration information.