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US 12,578,654 B2Granted
Method for calibrating a manipulable optical module
AssigneeCarl Zeiss SMT GmbH
InventorsMatthias Manger, Regina Christ
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AssigneeCarl Zeiss SMT GmbH
InventorsMatthias Manger, Regina Christ
Estimating the term…
A method for calibrating a manipulable optical module for a microlithographic projection exposure apparatus, which comprises at least one manipulation element for setting an at least one-dimensional local variation profile of an optical property of the optical module is provided. The method comprises: applying a temporally varying excitation signal to the at least one manipulation element; determining a raw measurement data set via a measurement device measuring the respective local variation profile resulting at different times during the variation of the excitation signal; estimating a temporally varying scaling, caused by the temporal variation of the excitation signal, in the variation profiles of the raw measurement data set; determining a full effect profile of the optical property by fitting the temporally varying scaling to the variation profiles of the raw measurement data set; and determining calibration data of the manipulable optical module on the basis of the full effect profile.
A method for calibrating a manipulable optical module for a microlithographic projection exposure apparatus, the optical module comprising a manipulation element configured to set an at least one-dimensional local variation profile of an optical property of the optical module, the method comprising:
A system configured to calibrate a manipulable optical module for a microlithographic projection exposure apparatus, the optical module comprising a manipulation element configured to set an at least one-dimensional local variation profile of an optical property of the optical module, the system comprising:
Dependencies are inferred from the claim text.