Pressure sensor and method of manufacturing pressure sensor
AssigneeRohm Co., Ltd.
InventorsMartin Wilfried Heller, Toma Fujita
Life of this patent
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AssigneeRohm Co., Ltd.
InventorsMartin Wilfried Heller, Toma Fujita
Estimating the term…
A pressure sensor includes: a substrate having first and second main surfaces and having a thickness in first direction; a first chamber recessed from the first main surface in the first direction with respect to the substrate; a second chamber recessed from the first main surface in the first direction with respect to the substrate and adjacent to the first chamber in second direction; a fluid passage recessed from the first main surface in the first direction with respect to the substrate and causing the first chamber to be in fluid communication with an outside; a closing layer laminated on the first main surface of the substrate and closing openings of the first chamber and the second chamber; and a membrane partitioned by the first and second chambers in the second direction and extending in a plane parallel to the first direction and a third direction.
A pressure sensor comprising:
A method of manufacturing a pressure sensor, comprising:
Dependencies are inferred from the claim text.