Laser interferometer
AssigneeSeiko Epson Corporation
InventorKohei Yamada
Life of this patent
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Abstract
A laser interferometer includes: a laser light source configured to emit first laser light; an optical modulator including a vibration element and configured to modulate the first laser light using the vibration element and generate second laser light including a modulation signal; a light receiving element configured to receive third laser light including a sample signal generated by the first laser light being reflected by an object and the second laser light, and output a light reception signal; a demodulation circuit configured to demodulate the sample signal from the light reception signal; and a correction circuit configured to detect a force acting on the vibration element from a change in vibration of the vibration element and correct the light reception signal based on the force.
Claims17
A laser interferometer comprising:
- a laser light source configured to emit first laser light;
- an optical modulator including a vibration element and configured to modulate the first laser light using the vibration element and generate second laser light including a modulation signal;
- a light receiving element configured to receive third laser light including a sample signal generated by the first laser light being reflected by an object and the second laser light, and output a light reception signal;
- a demodulation circuit configured to demodulate the sample signal from the light reception signal;
- and
- a correction circuit configured to detect a force acting on the vibration element from a change in vibration of the vibration element and correct the light reception signal based on the force.
A laser interferometer comprising:
- a laser light source configured to emit first laser light;
- an optical modulator including a vibration element and configured to modulate the first laser light using the vibration element and generate second laser light including a modulation signal;
- a light receiving element configured to receive third laser light and the first laser light, and output a light reception signal, the third laser light including the modulation signal and a sample signal that is generated by the second laser light being reflected by an object;
- a demodulation circuit configured to demodulate the sample signal from the light reception signal;
- and
- a correction circuit configured to detect a force acting on the vibration element from a change in vibration of the vibration element and correct the light reception signal based on the force.
A laser interferometer comprising:
- a laser light source configured to emit first laser light;
- an optical modulator including a vibration element and configured to modulate, using the vibration element, third laser light including a sample signal generated by the first laser light being reflected by an object, and generate second laser light including the sample signal and a modulation signal;
- a light receiving element configured to receive the second laser light, which includes the sample signal and the modulation signal, and the first laser light, and output a light reception signal;
- a demodulation circuit configured to demodulate the sample signal from the light reception signal;
- and
- a correction circuit configured to detect a force acting on the vibration element from a change in vibration of the vibration element and correct the light reception signal based on the force.
Dependencies are inferred from the claim text.