Pupil image measuring device and method
AssigneeSamsung Electronics Co., Ltd.
InventorsSeungwoo Lee, Jinwoo Ahn, Taejoong Kim, Myungjun Lee
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Abstract
Provided is a pupil image measuring device including a light source configured to generate and output a light, a stage on which a measurement target is loaded, an optical system configured to transmit the light output from the light source, to the measurement target, a detector configured to detect a light reflected from the measurement target, and a spatial light distribution controller configured to adjust an intensity or amount of the light output from the light source or the reflected light, for each space of a plurality of spaces of the spatial light distribution controller, wherein the spatial light distribution controller is disposed on a pupil plane.
Claims18
A pupil image measuring device comprising:
- a light source configured to generate and output a light;
- an optical system configured to transmit the light output from the light source to a measurement target;
- a detector configured to detect a light reflected from the measurement target;
- and
- a spatial light distribution controller configured to adjust an intensity or amount of a light output from the light source or the reflected light, for each space of a plurality of spaces of the spatial light distribution controller,
- wherein the spatial light distribution controller is disposed on a first pupil plane, the first pupil plane being that of the light source or the detector.
A pupil image measuring device comprising:
- a light source configured to generate and output a light;
- an optical system configured to transmit the light from the light source to a measurement target;
- a detector configured to detect a light reflected from the measurement target;
- a spatial light distribution controller configured to adjust an intensity or amount of light output from the light source or the reflected light, for each space of a plurality of spaces of the spatial light distribution controller;
- and
- a device controller configured to control, based on a plurality of pupil images obtained by the detector, an operation of the spatial light distribution controller,
- wherein the optical system comprises an objective lens configured to condense the light, and
- wherein the spatial light distribution controller is disposed on a second pupil plane which is a conjugate pupil plane of a first pupil plane on the objective lens, and
- wherein the device controller is configured to determine that a light amount distribution of each of the plurality of pupil images is not uniform, based on determining that a deviation of reflectivity of each of the plurality of pupil images is higher than a preset threshold value.
A pupil image measuring device comprising:
- a light source configured to generate and output a light;
- an optical system configured to transmit the light from the light source to a measurement target;
- a detector configured to detect a light reflected from the measurement target;
- a relay lens module configured to transmit the reflected light from the measurement target to the detector;
- a spatial light distribution controller configured to adjust an intensity or amount of the light output from the light source or the reflected light, for each space of a plurality of spaces of the spatial light distribution controller;
- and
- a device controller configured to control, based on a plurality of pupil images obtained by the detector, an operation of the spatial light distribution controller,
- wherein the optical system comprises an objective lens configured to condense the light,
- wherein the spatial light distribution controller is disposed on a second pupil plane which is a conjugate pupil plane of a first pupil plane on the objective lens, and
- wherein the second pupil plane is that of the light source or the detector.
Dependencies are inferred from the claim text.