Dry space creation apparatus and dry space creation method

A dry space creation method using a dry space creation apparatus,

• the dry space creation apparatus comprising:
• a processing tank having an internal space;
• an expansion member that expands while leaving part of the internal space, the expansion member being provided in the processing tank;
• an elector as a blower or pump that forcibly ejects gas in the internal space out of the processing tank;
• a dry gas supplier that supplies dry gas to the internal space;
• and
• a controller that performs a first control in which the elector ejects the gas in the internal space out of the processing tank with the expansion member expanding and
• a second control in which the dry gas supplier supplies the dry gas to the internal space with the expansion member contracting, the method comprising:
• performing, by the controller the first control;
• and
• subsequently performing, by the controller, the second control, wherein
• when the first control is performed, the ejector forcibly ejects the gas in the internal space out of the processing tank while gas outside the processing tank is allowed to flow into an expansion space so that the expansion member expands under negative pressure applied to the internal space, the expansion space being configured to allow the expansion member to expand and contract.