Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method

A criterion data determination method, comprising:

• accessing a storage device configured to store abnormality data, the abnormality data being detected in data of a state quantity for a predetermined period, the predetermined period based on a set time of a continuously operable vacuum pump after the set time has passed since it was operated, wherein the abnormality data being from the continuously operable vacuum pump that is different from a target vacuum pump;
• determining a criterion data for judging an operation of the target vacuum pump based on the abnormality data of the continuously operable vacuum pump for a predetermined period based on the set time, the criterion data comprising a parameter related to the abnormality data, wherein the criterion data is determined, stored, and applied for each manufacturing process of a semiconductor manufacturing apparatus;
• acquiring, during operation of the target vacuum pump, a state quantity comprising sensor data received from the target vacuum pump;
• comparing the state quantity of the target vacuum pump with a statistical quantity of the criterion data based on the semiconductor manufacturing process;
• and
• performing a control to issue a notification to cause the operation of the target vacuum pump to stop or to continue the operation of the vacuum pump according to the comparison result.

A non-transitory computer readable recording medium storing a program that upon execution on a computer to cause a system at least to:

• access a storage device configured to store criterion data, the criterion data being indicative of judging a failure arrival possibility based on an abnormality data detected in data of a state quantity for a predetermined period, the predetermined period based on a set time of a continuously operable vacuum pump after the set time has passed since it was operated, wherein the abnormality data being from the continuously operable vacuum pump that is different from a target vacuum pump, the criterion data comprising a parameter related to the abnormality data, wherein the criterion data is determined, stored, and applied for each manufacturing process of a semiconductor manufacturing apparatus;
• acquire, during operation of the target vacuum pump, a state quantity comprising sensor data received from the target vacuum pump;
• compare a tendency of an abnormality data detected from data of a state quantity of an operating target vacuum pump with the criterion data stored in the storage device, and output the comparison result;
• compare the state quantity of the operating target vacuum pump with a statistical quantity of the criterion data based on the semiconductor manufacturing process;
• and
• perform a control to issue a notification to cause the operation of the target vacuum pump to stop or to continue the operation of the vacuum pump according to the comparison result.

A non-transitory computer readable recording medium storing a program that upon execution causes a computer to cause a system at least to:

• access a storage device configured to store abnormality data, the abnormality data being detected in data of a state quantity for a predetermined period, the predetermined period based on a set time of a continuously operable vacuum pump after the set time has passed since it was operated, the continuously operable vacuum pump being different from a target vacuum pump;
• determine a criterion data for judging a failure arrival possibility of the target vacuum pump based on the abnormality data of the continuously operable vacuum pump for a predetermined period based on the set time, the criterion data comprising a parameter related to the abnormality data, wherein the criterion data is determined, stored, and applied for each manufacturing process of a semiconductor manufacturing apparatus;
• acquire, during operation of the target vacuum pump, a state quantity comprising sensor data received from the target vacuum pump;
• compare the state quantity of the operating target vacuum pump with a statistical quantity of the criterion data based on the semiconductor manufacturing process;
• and
• perform a control to issue a notification to cause the operation of the target vacuum pump to stop or to continue the operation of the vacuum pump according to the comparison result.