US 12,576,538 B2 · Photoresist bottle replacement system

Abstract

The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.

Claims20

Dependent claims

A computer system for commanding a vehicle to replace a first photoresist (PR) bottle, comprising:

a memory configured to store a program and data for replacing the first PR bottle;
and
a processor configured to:
receive a request signal for replacing the first PR bottle, wherein the request signal comprises a first location associated with the first PR bottle;
send the vehicle to the first location;
and
control the vehicle to:
load the first PR bottle onto the vehicle;
transport the first PR bottle to a second location where a second PR bottle is located;
load the second PR bottle onto the vehicle;
remove a cap of the second PR bottle and a socket of the first PR bottle;
couple the socket onto the second PR bottle;
and
transport the second PR bottle to the first location.

11 more elements

Dependencies are inferred from the claim text.

Photoresist bottle replacement system

Life of this patent

Photoresist bottle replacement system

Life of this patent

Abstract

Claims20