Method of processing plate-shaped workpiece
AssigneeDisco Corporation
InventorsNobuyuki Fukushi, Kosei Kiyohara, Shohei Takeda, Gentaro Tsuruta
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Abstract
A method of processing a plate-shaped workpiece includes a workpiece supporting step of placing a plate-shaped workpiece on an upper surface of a sheet whose area is larger than that of the plate-shaped workpiece through a liquid resin interposed therebetween and supporting the plate-shaped workpiece on only the liquid resin that has solidified and the sheet, a processing step of processing the plate-shaped workpiece to divide the plate-shaped workpiece into a plurality of chips, and a pick-up step of picking up the chips from the sheet.
Claims9
A method of processing a plate-shaped workpiece, comprising:
- a workpiece supporting step of placing the plate-shaped workpiece on an upper surface of a sheet whose area is larger than that of the plate-shaped workpiece through a liquid resin interposed therebetween and supporting the plate-shaped workpiece on the liquid resin that has solidified and the sheet without using an annular frame;
- a step of gripping and securing an outer circumferential edge portion of the sheet that has solidified by means of a plurality of clamps which directly contact the outer circumferential edge portion;
- a processing step of processing the plate-shaped workpiece to divide the plate-shaped workpiece into a plurality of chips;
- and
- a pick-up step of picking up the chips from the sheet.
Dependencies are inferred from the claim text.