Atomizing apparatus for film formation and film forming apparatus using the same

An atomizing apparatus for film formation, comprising:

• a raw-material container configured to accommodate a raw-material solution;
• a cylindrical member configured to spatially connect inside of the raw-material container to an outer unit;
• an ultrasound generator having at least one ultrasound generation source configured to emit ultrasound;
• and
• a liquid tank where the ultrasound propagates to the raw-material solution through a middle solution, wherein
• the ultrasound generation source is located outside the liquid tank,
• the ultrasound generation source has a center between a plane extending from an inner side wall of the raw-material container and a plane extending from an outer side wall of the cylindrical member,
• provided that a center line of an ultrasound-emitting surface of the ultrasound generation source is designated as u, the ultrasound generation source is provided such that the center line u does not intersect the side wall of the cylindrical member and the center line u intersects the side wall of the raw-material container, and
• a carrier gas inlet is provided higher than the lower end of the cylindrical member inside the raw-material container.