Fluid delivery module
AssigneeIchor Systems, Inc.
InventorMichael Vogtmann
Life of this patent
Estimating the term…
Abstract
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow are formed with a variety of fluid flow components, including fluid flow components for mixing fluid flows. Fluid flow components for mixing flows utilize mixing elements configured to receive flows of two or more process fluid flows via fluid inlets, mix the fluid flow within the mixing element, and deliver mixed fluid to a down-stream fluid flow component or an outlet of an apparatus for controlling fluid flow.
Claims18
A system for processing articles, the system comprising:
- a first fluid supply configured to supply a first process fluid;
- a second fluid supply configured to supply a second process fluid;
- a process chamber configured to process articles;
- a fluid delivery module, the fluid delivery module comprising:
- a first inlet fluidly coupled to the first fluid supply;
- a second inlet fluidly coupled to the second fluid supply;
- an outlet fluidly coupled to the process chamber;
- a flow passage extending from the first and second inlets to the outlet;
- a first flow component, the first flow component comprising:
- a component body;
- a first port, a second port, and a third port, each of the first, second, and third ports formed in the component body, a first flow path extending from the first port to a junction, a second flow path extending from the second port to the junction, and a third flow path extending from the junction to the third port, the first, second, and third flow paths each forming a portion of the flow passage;
- and
- a mixing element, the mixing element located at the junction of the first flow component, the mixing element comprising a first fluid inlet, a second fluid inlet, and a fluid outlet, the first fluid inlet fluidly coupled to the first port, the second fluid inlet fluidly coupled to the second port, and the fluid outlet fluidly coupled to the third port.
A mixing element, the mixing element comprising:
- a tubular body extending along a longitudinal axis of the mixing element from an open end to a closed end, the tubular body having an outer surface and an inner surface;
- a first fluid inlet formed through the tubular body from the outer surface to the inner surface;
- a second fluid inlet formed through the tubular body from the outer surface to the inner surface;
- and
- a fluid outlet formed by the open end of the tubular body, wherein the outer surface comprises a first sealing surface proximate the closed end, a second sealing surface proximate the open end, and a groove surface extending from the first sealing surface to the second sealing surface;
- and wherein the first fluid inlet and the second fluid inlet are formed into the groove surface.
A mixing element, the mixing element comprising:
- a tubular body extending along a longitudinal axis of the mixing element from an open end to a closed end, the tubular body having an outer surface and an inner surface;
- a first fluid inlet formed through the tubular body from the outer surface to the inner surface;
- a second fluid inlet formed through the tubular body from the outer surface to the inner surface;
- and
- a fluid outlet formed by the open end of the tubular body, wherein the first fluid inlet comprises a plurality of holes, wherein each hole of the plurality of holes has a diameter, the diameter of each hole of the plurality of holes being different, and wherein the diameters of the plurality of holes decrease with increasing distance from the closed end of the tubular body along the longitudinal axis.
Dependencies are inferred from the claim text.