Apparatus for producing semiconductor device, and method for producing semiconductor device

An apparatus for producing a semiconductor device comprising:

• a stage on which a substrate is mounted;
• a bonding head capable of moving at least one of discretionary points relative to the stage;
• a bonding tool that is attached to the bonding head and bonds a chip to the substrate;
• a first camera that is attached to the bonding head and captures an image of a mounting surface, which is an upper surface of the stage or an upper surface of the substrate mounted on the stage, from above;
• and
• a controller,
• wherein the controller is configured to execute for each of one or more of the discretionary points:
• a first mounting process of mounting a reference chip on the mounting surface by moving the bonding head to the discretionary points and then driving the bonding tool;
• a reference image acquisition process of acquiring, as a reference image, an image of the mounting surface after the reference chip has been mounted thereon captured by the first camera;
• a second mounting process of mounting an inspection chip on the reference chip by positioning the bonding head on a basis of the reference image such that the inspection chip is allowed to be mounted directly above the reference chip and then driving the bonding tool;
• an inspection image acquisition process of acquiring, as an inspection image, an image of the mounting surface after the inspection chip has been mounted thereon captured by the first camera;
• a correction amount calculation process of calculating, as an area correction amount, a correction amount for a camera offset amount, which is an offset amount of the first camera with respect to the bonding tool, on a basis of a positional deviation between the reference chip and the inspection chip in the inspection image;
• and
• a storage process of associating the calculated area correction amount and a position of the discretionary points and then storing the associated information in a storage device.