Substrate processing apparatus, analysis method, display device, and program

A display device for displaying an operational status of a substrate processing apparatus, the substrate processing apparatus including a load port group that is a group of load ports each holding a carrier in which a plurality of substrates are to be stored, a processing unit group that is a group of processing units in which a substrate is to be processed, and a transport mechanism that transports a substrate between said load port group and said processing unit group, the display device comprising:

• an information display;
• and
• a display controller that displays operation information in a predetermined mode of display on said information display, the operation information being information regarding operations of an operating part group of operating parts that include said load port group, said processing unit group, and said transport mechanism,
• wherein said operation information includes:
• processing result information indicating a result of substrate processing performed by said substrate processing apparatus;
• and
• operational status information indicating a temporal breakdown of the operational status of said substrate processing apparatus and a temporal breakdown of an operational status of each operating part included in said operating part group,
• the operational status of each of said substrate processing apparatus and said operating parts is hierarchically classified into a plurality of broadly classified operational statuses according to a large classification and into a plurality of specifically classified operational statuses obtained by further classifying said plurality of broadly classified operational statuses,
• said display controller displays said processing result information on said information display while arranging said processing result information according to an arrangement item selected from among a predetermined arrangement item group that includes an arbitrary operating period of said substrate processing apparatus, and
• said display controller classifies said operational status information into said plurality of broadly classified operational statuses and into said plurality of specifically classified operational statuses and displays said operational status information that has been classified on said information display while arranging said operational status information according to an arrangement item selected from among said arrangement item group.

A non-transitory computer readable medium storing a program for causing a substrate processing apparatus to display operation information in a predetermined mode of display on an information display, the substrate processing apparatus including a load port group that is a group of load ports each holding a carrier in which a plurality of substrates are to be stored, a processing unit group that is a group of processing units in which a substrate is to be processed, and a transport mechanism that transports a substrate between said load port group and said processing unit group, the operation information being information regarding operations of an operating part group of operating parts that include said load port group, said processing unit group, and said transport group,

• wherein the operation information includes:
• processing result information indicating a result of substrate processing performed by said substrate processing apparatus;
• and
• operational status information indicating a temporal breakdown of an operational status of said substrate processing apparatus and a temporal breakdown of an operational status of each operating part included in said operating part group,
• the operational status of each of said substrate processing apparatus and said operating parts is hierarchically classified into a plurality of broadly classified operational statuses according to a large classification and into a plurality of specifically classified operational statuses obtained by further classifying said plurality of broadly classified operational statuses, and
• said program is executed by a computer to:
• display said processing result information on said information display while arranging said processing result information according to an arrangement item selected from among a predetermined arrangement item group that includes an arbitrary operating period of said substrate processing apparatus, and
• classify said operational status information into said plurality of broadly classified operational statuses and into said the plurality of specifically classified operational statuses and display said operational status information that has been classified on said information display while arranging said operational status information according to an arrangement item selected from among said arrangement item group.