Protective liner for plasma source
AssigneeApplied Materials, Inc.
InventorsRyan T. Downey, James L'Heureux
Life of this patent
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Abstract
A plasma source is provided including: a dielectric tube having one or more interior surfaces extending from a first opening at a first end of the dielectric tube to a second opening at a second end of the dielectric tube; a coil antenna disposed around the dielectric tube; and a dielectric liner positioned inside the dielectric tube. The dielectric liner includes one or more outer surfaces. The dielectric liner is disposed around an interior plasma-generating volume of the plasma source. The dielectric liner extends from a first end of the dielectric liner to a second end of the dielectric liner, and the dielectric liner covers the one or more interior surfaces of the dielectric tube.
Claims18
A plasma source comprising:
- a dielectric tube having one or more interior surfaces extending from a first opening at a first end of the dielectric tube to a second opening at a second end of the dielectric tube;
- a coil antenna disposed around the dielectric tube;
- and
- a dielectric liner positioned inside the dielectric tube, wherein
- the dielectric liner includes one or more outer surfaces,
- the dielectric liner is disposed around an interior plasma-generating volume of the plasma source,
- the dielectric liner extends from a first end of the dielectric liner to a second end of the dielectric liner,
- the dielectric liner covers the one or more interior surfaces of the dielectric tube, and
- the dielectric liner is positioned on one or more supports to center the dielectric liner in the dielectric tube.
An abatement system comprising:
- a power source;
- and
- a plasma source comprising:
- a dielectric tube having one or more interior surfaces extending from a first opening at a first end of the dielectric tube to a second opening at a second end of the dielectric tube;
- a coil antenna disposed around the dielectric tube, the coil antenna electrically connected to the power source;
- and
- a dielectric liner positioned inside the dielectric tube, wherein
- the dielectric liner includes one or more outer surfaces,
- the dielectric liner is disposed around an interior plasma-generating volume of the plasma source,
- the dielectric liner extends from a first end of the dielectric liner to a second end of the dielectric liner,
- the dielectric liner is configured to be moved through the first opening or the second opening of the dielectric tube, and
- the dielectric liner is positioned on one or more supports to center the dielectric liner in the dielectric tube.
A plasma source comprising:
- a dielectric tube having one or more interior surfaces extending from a first opening at a first end of the dielectric tube to a second opening at a second end of the dielectric tube;
- a coil antenna disposed around the dielectric tube;
- and
- a dielectric liner positioned inside the dielectric tube, wherein
- the dielectric liner includes one or more outer surfaces,
- the dielectric liner is disposed around an interior plasma-generating volume of the plasma source,
- the dielectric liner extends from a first end of the dielectric liner to a second end of the dielectric liner,
- the dielectric liner is configured to be removed through the first opening or the second opening of the dielectric tube,
- the dielectric liner is positioned on one or more supports to center the dielectric liner in the dielectric tube,
- the one or more outer surfaces of the dielectric liner are spaced apart from the dielectric tube by a gap of less than about 0.02 inches, and
- the dielectric liner has a thickness from about 0.05 inches to about 0.20 inches.
Dependencies are inferred from the claim text.