Inter-period control system for plasma power delivery system and method of operating same
AssigneeAdvanced Energy Industries, Inc.
InventorGideon Van Zyl
Life of this patent
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Abstract
A generator produces output such as delivered power, voltage, current, forward power etc. that follows a prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling sections of the pattern based on measurements taken one or more repetition periods in the past. A variable impedance match network may control the impedance presented to a radio frequency generator while the generator produces the output that follows the prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling variable impedance elements in the match during sections of the pattern based on measurements taken one or more repetition periods in the past.
Claims19
A power delivery system comprising:
- a generator configured to produce pulses;
- and
- a controller configured to control the pulses based on at least one measurement of the pulses taken during a period prior to a current period combined with at least one measurement of a value of the pulses during the current period.
A method for delivering power comprising:
- producing power pulses;
- obtaining at least one measurement of a value of the power pulses during a current period;
- obtaining at least one measurement of the power pulses taken during a period prior to the current period;
- and
- controlling the power pulses based on the at least one measurement of the power pulses taken during the period prior to the current period combined with the at least one measurement of the power pulses during the current period.
A plasma power delivery system comprising:
- an impedance matching network that matches a load impedance to a desired impedance in which the load impedance is subject to a periodic modulation pattern that repeats with a repetition period;
- and
- a controller operably coupled to the impedance matching network, wherein the controller is configured to control a variable impedance element in the impedance matching network based on a measurement of a value of the load impedance taken one or more repetition periods in the past combined with at least one measurement of a value of the load impedance taken during a current period.
Dependencies are inferred from the claim text.