Electron optical column and method for directing a beam of primary electrons onto a sample
AssigneeASML Netherlands B.V.
InventorsMans Johan Bertil Osterberg, Kenichi Kanai
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Abstract
Apparatus and methods for directing a beam of primary electrons along a primary beam path onto a sample are disclosed. In one arrangement, a beam separator diverts away from the primary beam path a beam of secondary electrons emitted from the sample along the primary beam path. A dispersion device is upbeam from the beam separator. The dispersion device compensates for dispersion induced in the primary beam by the beam separator. One or more common power supplies drive both the beam separator and the dispersion device.
Claims20
An electron optical column configured to direct a beam of primary electrons along a primary beam path onto a sample, comprising:
- a beam separator configured to divert away from the primary beam path a beam of secondary electrons emitted from the sample along the primary beam path;
- a dispersion device upbeam from the beam separator, the dispersion device being configured to compensate for dispersion induced in the primary beam by the beam separator;
- and
- one or more common power supplies each configured to drive both the beam separator and the dispersion device.
A charged particle assessment tool comprising;
- an electron optical column configured to direct a beam of primary electrons along a primary beam path onto a sample, the electron optical column comprising:
- a beam separator configured to divert away from the primary beam path a beam of secondary electrons emitted from the sample along the primary beam path;
- a dispersion device upbeam from the beam separator, the dispersion device being configured to compensate for dispersion induced in the primary beam by the beam separator;
- and
- one or more common power supplies each configured to drive both the beam separator and the dispersion device.
A method of directing a beam of primary electrons along a primary beam path onto a sample, comprising:
- using a beam separator to divert away from the primary beam path a beam of secondary electrons emitted from the sample along the primary beam path;
- and
- using a dispersion device upbeam from the beam separator to compensate for dispersion induced in the primary beam by the beam separator, wherein one or more common power supplies are used to drive both the beam separator and the dispersion device.
Dependencies are inferred from the claim text.